|
Measurement Standards |
Reference
Documents |
Best Measurement Capability |
Range |
Calibrated
Instruments |
|
Automatic Gauge Block Interferometer |
Instruction Manual of TESA Interferometer
|
from 0.024 to 0.038 µm |
0.5 – 100 mm |
Gauge Blocks |
|
Standard Gauge Blocks;
TESA UPC Comparator |
Instruction Manual of TESA Comparator
|
from 0.05 to 0.10 µm |
0.5 – 100 mm |
Gauge Blocks |
|
Standard Gauge Blocks and / or Length Bars;
Federal Comparator |
Instruction Manual of Federal Comparator
|
from 0.04 to 0.3 µm |
25 - 600 mm |
Gauge Blocks and Length Bars |
|
Standard Gauge Blocks and / or Length Bars;
Matrix Level Comparator |
BCS
The Calibration of Length Bars |
from 0.6 to 1.2 µm |
600 – 1200 mm |
Gauge Blocks and Length Bars |
|